For more information, contact:

Tom Grove Advanced Energy Industries, Inc. (970) 224-6313

Advanced Energy Announces the New RFG 3001 CE-Certified, 13.56 MHz Power Supply

FORT COLLINS, Colorado (November 4, 1997)—AE’s new RFG 3001 continues the application of AE’s patented RF circuit topology to deliver up to 3000 W into a 50-ohm, non-reactive load. Plasma process tool applications for the RFG 3001 include plasma etch and deposition, reactive ion itch (REI), RF sputtering, RF bias, and other related plasma processes. The RFG 3001 provides high-accuracy forward-power and delivered-power regulation. The RFG 3001 is certified by CE, UL/CSA, GS, and is Semi S2-compliant.

 

The RFG 3001 is designed for your applications requiring 1% regulation accuracy as well as 0.5% power repeatability. It gives you control flexibility through a 25-pin analog/digital User port. You can mount the compact RFG 3001 directly to your tool or up to two RFG 3001s, a side-by-side, in a standard 19-inch rack.

The RFG 3001 uses a 3 phase, 208 Vac, 50/60 Hz power source. It is water-cooled, and provides control signals for powering an externally-mounted water flow solenoid. This thermally controlled solenoid conserves water and prevents condensation buildup in systems with low water temperatures.

• Certified by CE, UL/CSA, and GS; compliant with Semi S2
• Bulkhead-mounted ac power connector for easy installation and maximum power wiring flexibility
• Front panel indicators: AC On, RF On, Interlock Open, Power Limit, Overtemp
• Incorporates internal protection limits permitting safe and reliable operation

For a free copy of literature describing the new RFG 3001, contact AE at the address, phone number, or website given above.

Founded in 1981, AE is a leading supplier of power conversion and control systems for plasma-based thin film production equipment. Our systems are critical to industrial processes that use gaseous plasmas to deposit or etch thin film layers on materials or substrates such as glass, silicon, and metals during the manufacture of semiconductors, data storage media, flat panel displays, and a host of other products.