For more information, contact:

Jim Donaldson Advanced Energy Industries, Inc. 970.407.6374

Marna Shillman Advanced Energy Industries, Inc. 970.407.6280 marna.shillman@aei.com

AE's Aera^® MFCs Named Default Standard on CVD Systems

Fort Collins, Colo., Jan. 16, 2003—Advanced Energy Industries, Inc. (Nasdaq: AEIS) today announced that its Aera^® mass flow controllers (MFCs) have been selected as the default standard on chemical vapor deposition (CVD) systems by one of the world’s leading semiconductor equipment manufacturers. The designation was awarded to the Aera FC-D980 Series and FC-7800 Series MFCs, which have exhibited superior performance, reliability and value in a wide range of environments. A longtime customer of Advanced Energy’s power systems, the equipment maker will utilize the Aera products on a number of its key CVD systems.

 

“That this company, an influential industry leader and valued customer, has cited our MFC products for such a significant designation is a great honor,” said Advanced Energy Chairman and CEO Doug Schatz. “Moreover, it offers further proof that our products are continuing to gain acceptance in a growing variety of process applications. Our global leadership in MFC technology requires us to continually anticipate our customers’ needs, and being selected as the default standard provides tangible evidence of our success.”

FC-D980 Series
The Aera FC-D980 Series MFCs feature CPU memories that can store calibration curves for up to eight different gases and up to 11 calibration points for each gas, enabling enhanced accuracy and linearity, without degradation, throughout the operating range. The FC-D980 Series MFCs can be easily reassigned to different gases and full-scale flows using a PC, and can be operated in digital, analog or analog/digital mode. The products also provide impressive flexibility of gas and flow selection, while significantly reducing spare MFC inventory.

FC-7800 Series
The Aera FC-7800 Series metal-sealed MFCs deliver proven performance for the majority of gas control applications. Advanced Energy offers the FC-7800 products with a variety of electrical connectors that include Aera flow product-exclusive designs, as well as standard connectors that allow direct replacement of other manufacturers’ MFCs. These capabilities help ensure flexibility and streamline incorporating these MFCs into the manufacturing process.

About Advanced Energy
Advanced Energy is a global leader in the development, marketing and support of components and sub-systems critical to plasma-based manufacturing processes used in the production of semiconductors, flat panel displays, data storage products, compact discs, digital video discs, architectural glass, and other applications that require precise thin-film processes. AE offers a comprehensive line of technology solutions in power, flow and thermal management, plasma and ion beam sources, and integrated process monitoring and control to original equipment manufacturers (OEMs) and end-users around the world. AE operates in regional centers in North America, Asia and Europe, and offers global sales and support through direct offices, representatives and distributors. Founded in 1981, AE is a publicly held company traded on the Nasdaq National Market under the symbol AEIS. For more information, please visit our corporate website: www.advanced-energy.com